PHYS 5330. PHYSICS OF SEMICONDUCTOR PROCESSING AND CHARACTERIZATION. 3 Hours.
This course provides an in-depth exploration of the physical principles underlying semiconductor fabrication processes and the techniques used for material and device characterization. It is designed to equip students with both theoretical knowledge and practical skills relevant to the semiconductor industry and research. Selection from the following topics: physics of crystal growth, lattice defects, impurity diffusion, ion-implantation, thin film growth and plasma etching. Physics of characterization techniques utilizing resistivity, carrier mobility and lifetimes, electrons, x-rays, ions, Rutherford backscattering, neutron activation analysis, positron annihilation spectroscopy, deep-level transient spectroscopy.