Introduction to Very Large Scale Integration circuit design and fabrication technology. Metal-Oxide Semiconductor (MOS) device models and digital integrated circuit design with Metal-Oxide Semiconductor Field-Effect Transistor (MOSFETs). Computer Aided Drafting (CAD) tools for VLSI design. Processing models and process flow. MOS integrated circuits for logic gates and digital systems. Prerequisite: Grade of C or better in EE 3444.