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EEĀ 5343. SILICON INTEGRATED CIRCUIT FABRICATION TECHNOLOGY. 3 Hours.

Basic integrated circuit fabrication processes: crystal growth (thin film and bulk), thermal oxidation, dopant diffusion/implantation, thin film deposition/etching, and lithography. Introduction to process simulators, such as SUPREM. Fabrication and characterization of resistors, MOS capacitors, junction diodes and MOSFET devices. Prerequisite: Pass the NanoFAB Safety and Clean Room Protocol test.

Electrical Engineering - Graduate Programs

http://catalog.uta.edu/engineering/electrical/graduate/

The course offerings provide the student with an opportunity to broaden as well as to intensify his or her knowledge in a number of areas of electrical engineering. The student, with the aid of a faculty adviser, may plan a program in any one of a number of fields of specialization within electrical engineering or from the offerings of related departments in science and engineering.