EE 5343. SILICON INTEGRATED CIRCUIT FABRICATION TECHNOLOGY. 3 Hours.
Basic integrated circuit fabrication processes: crystal growth (thin film and bulk), thermal oxidation, dopant diffusion/implantation, thin film deposition/etching, and lithography. Introduction to process simulators, such as SUPREM. Fabrication and characterization of resistors, MOS capacitors, junction diodes and MOSFET devices. Prerequisite: Pass the NanoFAB Safety and Clean Room Protocol test.