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EE 6345. ADVANCED MEMS -- MICROELECTROMECHANICAL SYSTEMS. 3 Hours.

Microelectromechanical systems (MEMS) and devices including micro-actuators and optical MEMS. Application strategy of MEMS; fabrication and design; actuation mechanism and architectures; optical sensor and communication applications. Mask layout and hands-on design, fabrication procedures, design rules, demonstrated examples, and integration architectures. Prerequisite: EE 5344.

Electrical Engineering - Graduate Programs

http://catalog.uta.edu/engineering/electrical/graduate/

...Semiconductors EE 5381 Approved Substitution: EE EE 6342 EE 6343 EE 6344 EE 6345 10...