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EEĀ 5344. INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS) AND DEVICES. 3 Hours.

Develops the basics for microelectromechanical devices and systems including microsensors, and micromotors, principles of operation, different micromachining techniques, and thin-film technologies as they apply to MEMS.

Electrical Engineering - Graduate Programs

http://catalog.uta.edu/engineering/electrical/graduate/

...EE 5344 EE 5344 - Introduction to MEMS EE 5345 EE 5381 - Foundations in Semiconductors EE...