Search Results

EEĀ 5343. SILICON INTEGRATED CIRCUIT FABRICATION TECHNOLOGY. 3 Hours.

Basic integrated circuit fabrication processes: crystal growth (thin film and bulk), thermal oxidation, dopant diffusion/implantation, thin film deposition/etching, and lithography. Introduction to process simulators, such as SUPREM. Fabrication and characterization of resistors, MOS capacitors, junction diodes and MOSFET devices. Prerequisite: Pass the NanoFAB Safety and Clean Room Protocol test.

Electrical Engineering - Graduate Programs

http://catalog.uta.edu/engineering/electrical/graduate/

...EE 5387 EE 5388 9. Nanotechnology and MEMS - Materials and Devices EE 5343 EE 5343...